发明名称 METHOD AND DEVICE FOR INCREASING FIN DEVICE DENSITY FOR UNALIGNED FINS
摘要 A method of generating a layout for a device includes receiving a first layout including a plurality of active regions, each active region of the plurality of active regions having sides. The method further includes defining a plurality of elongate mandrels that each extend in a first direction and are spaced apart from one another in a second direction perpendicular to the first direction. The method further includes for each adjacent pair of partially-parallel active regions of the plurality of active regions having a minimum distance less than a specified minimum spacing, connecting at least a portion of nearest ends of pairs of elongate mandrels, each mandrel of a pair from a different active region. The method further includes generating a second layout including a plurality of elongate mandrels in the plurality of active regions, and connective elements between active regions of at least one adjacent pair of active regions.
申请公布号 US2014013288(A1) 申请公布日期 2014.01.09
申请号 US201314018133 申请日期 2013.09.04
申请人 TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. 发明人 WANG CHIEN-HSUN;CHANG CHIH-SHENG;LIN YI-TANG;SHIEH MING-FENG
分类号 G06F17/50;G03F1/00 主分类号 G06F17/50
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