发明名称 RADIATION DETECTION APPARATUS AND METHOD OF MANUFACTURING THE SAME
摘要 A method of manufacturing a radiation detection apparatus is provided. On a sensor substrate on which a pixel array is formed, a scintillator layer that covers the pixel array, a sealing layer that covers a side face of the scintillator layer, and a protection layer that covers an upper face of the scintillator layer and an upper face of the sealing layer are formed. The sensor substrate, the sealing layer, and the protection layer along a side of the pixel array are cut such that a cut surface of the sensor substrate, a cut surface of the sealing layer, and a cut surface of the protection layer are arranged on the same plane.
申请公布号 US2014008749(A1) 申请公布日期 2014.01.09
申请号 US201313927844 申请日期 2013.06.26
申请人 CANON KABUSHIKI KAISHA 发明人 NOMURA KEIICHI;NAGANO KAZUMI;OKADA SATOSHI;ISHIDA YOHEI;SARUTA SHOSHIRO;SASAKI YOSHITO;ICHIMURA TOMOAKI
分类号 H01L27/146 主分类号 H01L27/146
代理机构 代理人
主权项
地址