| 摘要 |
A thermal convection type angular accelerometer includes an insulating substrate and an angular acceleration sensing device. The angular acceleration sensing device is disposed on the insulating substrate. The angular acceleration sensing device is configured to measure an angular acceleration of a rotation axis. The angular acceleration sensing device comprises a sensing group. The sensing group comprises two temperature sensing members and a heater disposed between the two temperature sensing members. The distance between two ends of the two temperature sensing members near the rotation axis is greater than the distance between the other two ends of the two temperature sensing members that are farther from the rotation axis. |
