| 摘要 |
In a simplified configuration, provided is a film formation method for easily depositing fine particles of a relatively large particle diameter on a basic material. According to an embodiment of the present invention, the method comprises the following steps: fine particles having a coating layer, which is easier to be electrified than a basic material, in a surface of the basic material are accommodated in a sealed container; an aerosol of the fine particles is generated by introducing gas to the sealed container; the fine particles are electrified by friction with the inner surface of a return pipe through the return pipe having a nozzle in a leading end connected to the sealed container; the aerosol is returned to a film formation chamber which maintains a lower pressure than the sealed container; and the fine particles, which are electrified to the basic material accommodated in the film formation chamber, are deposited since the nozzle sprays the aerosol. |
