| 摘要 |
PROBLEM TO BE SOLVED: To provide a thermal flowmeter 300 which achieves increased operation efficiency of a flow rate measurement device having a function for measuring temperature of measurement gas 30, and which also achieves increased accuracy of temperature measurement.SOLUTION: A thermal flowmeter of the present invention includes: a flow rate measurement circuit package 400 which is formed using a resin mold and which has a protrusion 424 for measuring gas temperature; and an inlet 343 which is formed to be open to an upstream side of measurement gas 30. The protrusion 424 is provided inside the inlet. Along the protrusion 424, an outlet 344 and an outlet 345 are formed on a front cover 303 and a rear cover 304. With this structure, the measurement gas 30 taken in from the inlet 343 flows along the protrusion 424. Accordingly, the measurement gas 30 having undergone measurement flows along the protrusion 424. This reduces effect of heat coming from other heat resources, thus achieving increased measurement accuracy. |
