| 摘要 |
PROBLEM TO BE SOLVED: To properly perform inspection of electrical characteristics of a test object while stabilizing contact between the test object and contact pieces.SOLUTION: A probe card 100 inspects electrical characteristics of a wafer W. The probe card 100 includes: a circuit board 110 on which open holes 113 are formed; a plurality of contact pieces 111 for coming into contact with a test object; a contact piece support plate 112 that is provided downward of the circuit board 110 and supports the plurality of contact pieces 111; and a fluid chamber 121 that penetrates the open holes 113 of the circuit board 110 from upward during a test to depress the contact piece support plate 112 to a wafer W side to provide a depressing force between the plurality of contact pieces 111 and wafer W. |
