发明名称 HIGH DENSITY CAPACITORS UTILIZING THIN FILM SEMICONDUCTOR LAYERS
摘要 The present invention generally relates to a capacitor. By utilizing a semiconductor material between two electrodes, the storage capacity of the capacitor is increased as compared to a metal-insulator-metal capacitor.
申请公布号 US2014008761(A1) 申请公布日期 2014.01.09
申请号 US201213488607 申请日期 2012.06.05
申请人 YE YAN;APPLIED MATERIALS, INC. 发明人 YE YAN
分类号 H01L49/02 主分类号 H01L49/02
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