发明名称 |
HIGH DENSITY CAPACITORS UTILIZING THIN FILM SEMICONDUCTOR LAYERS |
摘要 |
The present invention generally relates to a capacitor. By utilizing a semiconductor material between two electrodes, the storage capacity of the capacitor is increased as compared to a metal-insulator-metal capacitor. |
申请公布号 |
US2014008761(A1) |
申请公布日期 |
2014.01.09 |
申请号 |
US201213488607 |
申请日期 |
2012.06.05 |
申请人 |
YE YAN;APPLIED MATERIALS, INC. |
发明人 |
YE YAN |
分类号 |
H01L49/02 |
主分类号 |
H01L49/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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