| 摘要 |
<p>Provided is a substrate treatment system provided with a substrate treatment device which generates device data relating to substrate treatment, and a management device which is connected to at least one substrate treatment device via a network and receives and stores the device data cyclically reported from the substrate treatment device, the substrate treatment device being provided with a storage unit which associates and stores the device data generated in the substrate treatment device, the report cycle or the number of reports of the device data to the management device, and the degree of importance of the device data with the data type of the device data, and a control unit which, when the report cycle of the device data is changed, determines the type of data the report cycle of which is to be changed, on the basis of the report cycle or the number of reports and the degree of importance of each data type stored in the storage unit.</p> |
