| 摘要 |
A carbon nano tube synthesis apparatus is provided to save manufacturing cost by simplifying a structure of the apparatus, to improve temperature equability by maximizing the surface area of carbon nano tube substrate by employing a metal string form, and to enable mass production of carbon nano tube by employing bobbin-like system. A carbon nano tube synthesis apparatus has: carbon nano tube supply part(10) which supplies a metal string type carbon nano tube substrate(1); carbon nano tube growing part(20) in which a carbon nano tube grows in a process comprising supplying a plasma reaction gas and a source gas on the carbon nano tube substrate from the carbon nano tube supply part in order to decompose the carbon source gas at high temperature for the growth of the carbon nano tube; and carbon nano tube storing part(30) for storing the carbon nano tube substrate having carbon nano tube synthesized in the carbon nano tube growing part. Central axises of the carbon nano tube supply part, the carbon nano tube growing part and the carbon nano tube storing part are shafts(12,22,32), respectively, and only the shaft of the carbon nano tube storing part is a drive shaft which rotates with driving. The metal string type carbon nano tube substrate is unwound toward a driven shaft which makes an idle revolution, of which outer circumference is wound with the carbon nano tube substrate of metal string type. Alternatively, each of the shafts of the carbon nano tube supply part, the carbon nano tube growing part and the carbon nano tube storing part is supplied with a driving power for the revolution of all the shafts with the same revolution rate. The carbon nano tube growing part is supplied with plasma gas and source gas for the synthesis of carbon nano tube, and the growing part is equipped with an electrode(42) which enhances the decomposition of the source gas for plasma generation and a heater(44) which decomposes source gas at high temperature. |
