发明名称 |
PROCESSING APPARATUS USING A FINE AIR BUBBLES |
摘要 |
The present invention provides a fine bubble type processing device capable of improving productivity by reducing manufacturing costs and improving washing efficiency. The present invention includes a processing tank (14) including an accommodation tank (28) of which the upper part is open for immersing one or more non-processed members (12) in a fluid (18) and flow receiving units (16) respectively installed on both sides facing each other across the upper opening of the accommodation tank (28); two movable flow inducing plates (20) installed in the accommodation tank (28); and an aeration device (24) arranged on the lower part of the non-processed member (12), immersed in the fluid (18), and installed in the accommodation tank (28). The aeration device (24) generates a plurality of fine bubbles of the same size processing the surface of the non-processed member by being linearly rising at the same speed in the fluid (18). The two movable flow inducing plates (20) induce the fine bubbles, which move upwards in the fluid (18) by accompanying impurities separated from the surface after processing, to flow towards the two flow receiving units (16). |
申请公布号 |
KR20140002517(A) |
申请公布日期 |
2014.01.08 |
申请号 |
KR20130073807 |
申请日期 |
2013.06.26 |
申请人 |
TAIWAN UYEMURA CO., LTD.;C. UYEMURA & CO., LTD. |
发明人 |
MIKI SATOSHI;WANG KAI YI;PENG CHIH CHIANG;SU SHENG I;TAI CHIA JUNG |
分类号 |
H01L21/302 |
主分类号 |
H01L21/302 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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