申请人 |
HERAEUS QUARZGLAS GMBH, 63450 HANAU, DE;SHIN-ETSU QUARTZ PRODUCTS CO., LTD., TOKIO/TOKYO, JP |
发明人 |
WATANABE, HIROYUKI, C/O SHIN-ETSU QUARTZ PRODUCTS, TAKEFU-SHI, FUKUI, JP;SATO, TATSUHIRO, C/O SHIN-ETSU QUARTZ PRODUCTS, TAKEFU-SHI, FUKUI, JP;MATSUI, HIROSHI, C/O SHIN-ETSU QUARTZ PR. CO., LTD, KORIYAMA-SHI, FUKUSHIMA, JP |