发明名称 Verfahren zur Herstellung eines Doppeltiegels für das Czochralski-Verfahren
摘要 A method of manufacturing a crucible for a double-crucible growing technique comprising the steps of: feeding quartz powder into a rotating mold; forming a crucible-like quartz powder layer body with the help of a centrifugal force in the mold; melting the layer body by heating through the inner surface with an arc discharge to manufacture an outer crucible member; and welding an inner crucible member to the outer crucible member while a temperature of the inner surface portion of the outer crucible member remains at 1400 DEG C or higher by a remaining heat. Quartz glass crucible for a double-crucible growing technique can be manufactured with excellent characteristics of junction, a low production cost and a high production yield.
申请公布号 DE69601013(T2) 申请公布日期 1999.06.10
申请号 DE1996601013T 申请日期 1996.05.21
申请人 HERAEUS QUARZGLAS GMBH, 63450 HANAU, DE;SHIN-ETSU QUARTZ PRODUCTS CO., LTD., TOKIO/TOKYO, JP 发明人 WATANABE, HIROYUKI, C/O SHIN-ETSU QUARTZ PRODUCTS, TAKEFU-SHI, FUKUI, JP;SATO, TATSUHIRO, C/O SHIN-ETSU QUARTZ PRODUCTS, TAKEFU-SHI, FUKUI, JP;MATSUI, HIROSHI, C/O SHIN-ETSU QUARTZ PR. CO., LTD, KORIYAMA-SHI, FUKUSHIMA, JP
分类号 C03B23/20;C03B19/04;C03B19/09;C03B20/00;C30B15/12;(IPC1-7):C30B15/12 主分类号 C03B23/20
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