| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide an acceleration detector for suppressing the error of crosstalk by the deviation of alignment and the manufacturing method. SOLUTION: Plural piezoresistance elements 12 are formed by diffusing impurities or the like at a part to be the flexible part of an Si substrate 11, and by etching the back surface of the Si substrate 11 to a desired depth by using etching liquid such as a KOH solution, an action part 18, the flexible part (diaphragm) 13 and a fixed part 17 are formed on the Si substrate 11. Then, the Si substrate 11 is heated to about 400 deg.C for instance and a molten tin-lead alloy used for soldering or the like for instance is extracted by using a dispenser or the like at the action part 18. At the time, the extracted tin-lead alloy is naturally spherically formed by the surface tension and the spherically formed weight body 14 is joined to the action part 18. Thus, the error of the crosstalk by the deviation of the alignment is suppressed.</p> |
