| 摘要 |
PROBLEM TO BE SOLVED: To simplify a detecting mechanism and shortening a time required for a mulfunction detection and a controlling process by detecting both a double receiving detection and an axis deviation detection, with the use of a single sensor. SOLUTION: A light projector and a light receiver 7 are provided in a wafer cassette handling mechanism 2 of a wafer cassette transfer apparatus 1. The existence of a received wafer cassette 3 is detected by combining the light projector and receiver 7 with a reflector 8 provided behind a receiving position of the wafer cassette 3 in a receiving shelf 6 attached to a wall face 5. Furthermore, it is determined as to whether the wafer cassette 3 can be received in a desired position without an axis deviation between the wafer cassette transfer apparatus 1 received in the shelf 6 and the wafer cassette handling mechanism 2 by a detector, consisting of the light projector and receiver 7, and the reflector 8. Since both a double receiving detection and an axis deviation detection are detected using the detector consists of the light projector and receiver 7, and the reflector 8, the detecting mechanism can be simplified and time required for mulfunction detection and controlling process can be shortened. |
