| 摘要 |
PROBLEM TO BE SOLVED: To improve productivity of a substrate processing process by increasing conveyance efficiency of a substrate. SOLUTION: The substrate processing apparatus includes a load lock chamber holding a plurality of substrates, a firsts conveyance chamber configured to communicate with the inside of the load lock chamber, a first processing chamber configured to communicate with the inside of the first conveyance chamber and processing the substrates, a relay chamber configured to communicate with the inside of the first conveyance chamber, a second conveyance chamber configured to communicate with the inside of the relay chamber, a second processing chamber configured to communicate with the inside of the second conveyance chamber and processing the substrates, a first conveyance robot for conveying the substrates among the load lock chamber, first processing chamber, and relay chamber, a second conveyance robot for conveying the substrates between the relay chamber and second processing chamber, and a control unit for controlling the first conveyance robot and second conveyance robot so that a time zone of conveyance of substrates into and from the first conveyance chamber by the first conveyance robot overlap with a time zone of conveyance of substrates into and from the second conveyance chamber by the second conveyance robot even slightly. COPYRIGHT: (C)2010,JPO&INPIT |
