发明名称 Capacitive transducer
摘要 Provided is a capacitive transducer including an element including a plurality of cells: each of the plurality of cells including: a first electrode; and a vibrating film including a second electrode, the second electrode being opposed to the first electrode with a gap; and a vibrating film supporting portion that supports the vibrating film so as to form the gap, in which the element includes a first cell and a second cell, the first cell including the vibrating film having a first spring constant, the second cell including the vibrating film having a second spring constant lower than the first spring constant; and a voltage to be applied between the first electrode and the second electrode of the first cell is higher than a voltage to be applied between the first electrode and the second electrode of the second cell.
申请公布号 EP2682195(A2) 申请公布日期 2014.01.08
申请号 EP20130173702 申请日期 2013.06.26
申请人 CANON KABUSHIKI KAISHA 发明人 TORASHIMA, KAZUTOSHI;AKIYAMA, TAKAHIRO
分类号 B06B1/02;G01H11/06 主分类号 B06B1/02
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