| 摘要 |
The task of the present invention is to provide a substrate processing system which can exclude an error of installing a wheel tip, which shouldn't be installed, in a fault manner and a method of installing tip holder used for the substrate processing system which comprises: a step of setting up a scribe recipe SD for each type of processes, wherein the scribe recipe SD is memorized by making the operation information, which determines the operational content of scribe processing, to be related to the allowed-format information (26), which specifies a wheel tip (12e) usable for the scribe processing to be remembered, in a computer (19) contacting a processing device (A); a step of selecting the scribe recipe SD; a step of determining the wheel tip (12e) appropriate for the allowed format information (26) included in the selected scribe recipe SD; and a step of decoding the code (12i) of a tip holder (12) loaded on a predetermined loading place, extracting the corresponding tip holder (12), and installing the tip holder (12) on the substrate processing device (A). [Reference numerals] (AA) Start; (S1) Selecting a scribe recipe; (S2) Wheel tip appropriate for the selected recipe is determined; (S3) Robot goes to take a tip holder on a loading shelf; (S4) Appropriate tip holder is determined by the reader of the robot which detects a code; (S5) Robot pulls out the tip holder from a tip holder storage; (S6) Robot installs the tip holder on a holder joint; (S7) Scribe like the recipe is automatically started |
