ULTRAVIOLET BAKE EQUIPMENT CAPABLE OF FLOWING PHOTORESIST

摘要

PURPOSE: Provided is ultraviolet bake equipment capable of flowing photoresist which can progress a process that bakes photoresist by UV and flows photoresist in the same equipment. CONSTITUTION: The ultraviolet bake equipment contains i) a hot plate; ii) a heating coil that is installed at the inside to control the temperature of the hot plate; iii) a cooling pass that is installed at the lower side of the heating coil; and iv) a pin for maintaining distance that is able to maintain distance with a wafer that is installed at the upside surface of the hot plate.