| 摘要 |
<p>The flow rate controller (1) has front and rear flow paths (2,3) that are provided between connecting pieces (21,22,31,32), where a front piston (5) is arranged in the front flow path relative to a valve seat (7). The flow rate of rear flow path is controllable by movement of the front piston. A diaphragm piston is movably sealed in housing cap (9) arranged in front side of the front flow path. A channel is formed along the diaphragm and front pistons by providing a through hole having a transverse hole which is opened to outlet side.</p> |
