| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To efficiently manufacture a synthetic quartz glass member having high transmissivity. <P>SOLUTION: There is provided a method of manufacturing the synthetic quartz glass member by: forming silica fine particles from a glass forming raw material by oxyhydrogen flame; depositing the silica fine particle on a rotated heat resistant base body to form a porous silica sintered body; and heating the sintered body under a vacuum or in an atmospheric gas in a heat treatment furnace to convert the porous silica sintered body into transparent glass. In the method, the plurality of porous silica sintered bodies are converted into the transparent glass at the same time by providing a plurality of rotary shafts rotated in the heat treatment furnace and charging the heat resistant base body and the porous silica sintered body deposited thereon into heat resistant cylinder tubes each mounted on each rotary shaft, heating the heat resistant base body and the porous silica sintered body by a heater surrounding the plurality of the cylinder tubes and having the height lower than that of the cylinder tubes while independently or synchronously rotating each of the rotary shafts. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
