发明名称 Probe array base, method for manufacturing probe array base, method for manufacturing probe array
摘要 A probe array base including probe-holding portions (102) which are periodically arranged on a solid base member (100) and which have grooves (105) is prepared by anisotropically etching a single-crystalline silicon substrate. Probe solutions are supplied to the probe-holding portions from a plurality of tank arrays having a certain cylinder period by capillary action. This allows a probe array to be completed. The probe array is used as, for example, a DNA or antigen chip, has a high degree of integration, and is capable of holding a constant and sufficient number of probe molecules.
申请公布号 EP2392403(A3) 申请公布日期 2014.01.08
申请号 EP20110179216 申请日期 2006.12.21
申请人 MURATA MANUFACTURING CO., LTD. 发明人 SHIBAHARA, TERUHISA
分类号 B01L3/00 主分类号 B01L3/00
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