VAPORIZER, CENTER ROD USED THEREIN, AND METHOD FOR VAPORIZING MATERIAL CARRIED BY CARRIER GAS

摘要

To obtain a vaporizer in which a plurality of thin film-forming raw material solutions are stably and reliably carried by a carrier gas while being reliably separated within the dispersion unit body and the plurality of thin film-forming raw material solutions are stably vaporized in the subsequent vaporization unit, a center rod used in the vaporizer, and a method for vaporizing raw materials entrained by a carrier gas. A carrier gas introduction bore is formed in the center axis direction of the dispersion unit body. A center rod 10 is inserted in the carrier gas introduction bore so that the interspace between the inner wall of the carrier gas introduction bore and the outer wall of the center rod forms a gas passage. Thin film-forming material supply units formed at multiple points situated midway of the gas passage of the dispersion unit body and supplying thin film-forming materials are provided. The center rod has sealing members 11a and 11b provided in the longitudinal direction of the center rod.