| 摘要 |
PROBLEM TO BE SOLVED: To solve a problem that the cost of a galvano mirror is increased, because the number of etching times is large at a galvano mirror working stage and an expensive substrate is used in order to enhance the working accuracy. SOLUTION: As for the galvano mirror where a frame body, a vibration body arranged in the frame body and a torsion beam for holding the vibration body are formed on the same substrate, besides, the frame body, the vibration body and the torsion beam have same thickness. |
