Broadband reflective waveguide metal gratings and their formation

摘要

Devices having reflective grating structures and methods of fabricating the same are disclosed. A bottom clad layer is disposed above a substrate. A waveguide core layer is disposed above the bottom clad layer. A top clad layer is disposed above the waveguide core layer. At least one metal grating structure is disposed adjacent to an interface between the waveguide core layer and one of the bottom clad layer and the top clad layer, where the at least one metal grating structure is configured to reflect at least a portion of an incident electromagnetic radiation coupled into the waveguide core layer.