发明名称 |
Substrate processing apparatus having electrode member |
摘要 |
An electrode member for generating plasma includes an electrode plate and a cooling unit having a plurality of thermoelectric modules that are thermally in contact with the electrode plate. The thermoelectric modules may regulate the temperature of the electrode plate based on the Peltier effect. |
申请公布号 |
US8623173(B2) |
申请公布日期 |
2014.01.07 |
申请号 |
US20080146790 |
申请日期 |
2008.06.26 |
申请人 |
SON HYOUNG-KYU;ADVANCED DISPLAY PROCESS ENGINEERING CO., LTD. |
发明人 |
SON HYOUNG-KYU |
分类号 |
C23C16/00;F25B21/02;H01L21/306 |
主分类号 |
C23C16/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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