发明名称 Coating apparatus
摘要 A coating apparatus includes a base, actuators, separating boards and a gas guide grill. The base includes a carrying surface for supporting a workpiece. The base defines recesses on the carrying surface. The actuators include shafts rotatably located in the recesses correspondingly, and motors for driving the shafts. The separating boards are located above the carrying surface and securely connected to the shafts. The separating boards define chambers therebetween. The separating boards are capable of being rotated toward the carrying surface by the shafts. The gas guide grill is located above the base. The gas guide grill defines gas guide holes corresponding to the chambers respectively.
申请公布号 US8623142(B2) 申请公布日期 2014.01.07
申请号 US20100947809 申请日期 2010.11.16
申请人 PEI SHAO-KAI;HON HAI PRECISION INDUSTRY CO., LTD. 发明人 PEI SHAO-KAI
分类号 C23C16/00;C23C16/452;C23F1/00;H01L21/306 主分类号 C23C16/00
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