| 摘要 |
A reverse vibration dual mass device type micro gyroscope and a control method thereof are provided to improve the sensitivity to velocity applied to the two mass devices by vibrating one of the mass devices at the same resonant frequency/amplitude and opposite phase to the other. A reverse vibration dual mass device type micro gyroscope comprises first and second mass devices(1,2) vibrating in X-axis direction, PLL & AGC(20) which is inputted with the capacitance between electrodes, changed according to the opposing area between the electrodes, as a voltage value when one of the mass devices vibrates, a resonant frequency controller(30) which makes the natural resonant frequency of the second mass device coincide with that of the first mass device, an amplitude controller(40) which makes the amplitude of the second mass device coincide with the amplitude of the detection signal of the first mass device, and a phase comparator(50) which determines whether the phase difference between the oscillation frequency of the first and second mass devices is 90°. |
