发明名称 Method for preparing an oriented-porosity dielectric material on a substrate by means of electromagnetic and photonic treatment
摘要 Provided a method for producing an oriented-porosity dielectric material on a substrate. The method includes depositing a composite layer on a substrate by vapor deposition comprising a material forming a matrix and a compound comprising chemical groups capable of being oriented under the effect of an electromagnetic field and/or photonic radiation; treating the composite layer to obtain the cross-linking of the material forming a matrix; and subjecting the substrate coated with the composite layer to an electromagnetic field and a photonic radiation.
申请公布号 US8623466(B2) 申请公布日期 2014.01.07
申请号 US201213367439 申请日期 2012.02.07
申请人 ZENASNI AZIZ;COMMISSARIAT A L'ENERGIE ATOMIQUE 发明人 ZENASNI AZIZ
分类号 C23C16/56;C08F2/48;C08F2/52 主分类号 C23C16/56
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