发明名称 |
Method for preparing an oriented-porosity dielectric material on a substrate by means of electromagnetic and photonic treatment |
摘要 |
Provided a method for producing an oriented-porosity dielectric material on a substrate. The method includes depositing a composite layer on a substrate by vapor deposition comprising a material forming a matrix and a compound comprising chemical groups capable of being oriented under the effect of an electromagnetic field and/or photonic radiation; treating the composite layer to obtain the cross-linking of the material forming a matrix; and subjecting the substrate coated with the composite layer to an electromagnetic field and a photonic radiation. |
申请公布号 |
US8623466(B2) |
申请公布日期 |
2014.01.07 |
申请号 |
US201213367439 |
申请日期 |
2012.02.07 |
申请人 |
ZENASNI AZIZ;COMMISSARIAT A L'ENERGIE ATOMIQUE |
发明人 |
ZENASNI AZIZ |
分类号 |
C23C16/56;C08F2/48;C08F2/52 |
主分类号 |
C23C16/56 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|