| 摘要 |
The purpose of the invention is to accurately control the in-plane temperature of susceptors by controlling the penetration of magnetic flux entering from rim portions of the susceptors. A heat treating apparatus is provided with: susceptors (200) which are conductive members with a loading surface on which a substrate is to be carried, each susceptor being divided into a rim portion (210) and an interior portion (220) surrounded by same, said interior portion comprising a thick plate-like heat generating body, and said rim portion formed by layering thin plate-like heat generating bodies, which are thinner than the interior portion, in a manner electrically insulated from each other; and electromagnets (120) which, from the lateral side of the susceptors, form alternating current magnetic fields parallel to the loading surfaces. The heat treating apparatus performs temperature control by causing the ratio between heat generation at the rim portion of each susceptor and heat generation at the interior portion to change by using two frequencies of high frequency current applied to the induction coil (124) wounded around the electromagnets to control the induction current generated at each thin film-like heat generating body and control penetration of magnetic flux up to the interior portions. |
