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发明名称
摘要
申请公布号
JP3276500(B2)
申请公布日期
2002.04.22
申请号
JP19940002826
申请日期
1994.01.14
申请人
发明人
分类号
C30B15/00;C30B15/14;C30B29/06;H01L21/66;(IPC1-7):C30B29/06
主分类号
C30B15/00
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代理人
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