发明名称 Methods for spatially resolved alignment of independent spectroscopic data from scanning transmission electron microscopes
摘要 Methods for spatially resolved alignment of independent spectroscopic data from scanning transmission electron microscopes (STEMs) are provided. One such method includes performing a first scan of a first area of a first sample using a STEM configured to capture a first signal having a first image profile, performing a second scan of a second area of a second sample using the STEM configured to capture a second signal having a second image profile, selecting a subset region from one of the first and second profiles, correlating the selected subset region from the one of the first and second profiles and the other of the first and second profiles, and selecting, based on the correlating, a portion of the other of the first and second profiles such that the selected subset region and the portion of the other of the first and second profiles are about equal.
申请公布号 US8624184(B1) 申请公布日期 2014.01.07
申请号 US201213688098 申请日期 2012.11.28
申请人 WESTERN DIGITAL TECHNOLOGIES, INC. 发明人 SOUZA GUILHERME PARENTE;RUTHE KURT CHARLES
分类号 H01J37/28 主分类号 H01J37/28
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