发明名称 PROBE CARD ASSEMBLY
摘要 The present invention relates to a probe card assembly. According to an embodiment of the present invention, the probe card assembly accurately controls the horizontal state of a probe card assembly. The probe card assembly includes a slight plate moved by a cam and a slight fixing part moving up and down.
申请公布号 KR20140001305(A) 申请公布日期 2014.01.07
申请号 KR20120067985 申请日期 2012.06.25
申请人 SOULBRAIN MEMSYS CO., LTD. 发明人 KIM, YOUNG WOO;HWANG, JONG WON
分类号 H01L21/66;G01R1/073 主分类号 H01L21/66
代理机构 代理人
主权项
地址