| 摘要 |
<p>The purpose of the present invention is to realize an effective filling process of a coating liquid on a nozzle. According to an embodiment of the present invention, a coating apparatus comprises a nozzle, a moving device, a pressure modulator, and a pressure controller. The nozzle comprises: a retention room where the coating liquid is stored; and a slit type passage connected to the retention room. The nozzle ejects the coating liquid from a discharge hole formed in the front end of the passage. The moving device moves the nozzle and a substrate relatively along the surface of the substrate. The pressure modulator modulates the pressure inside of the retention room. The pressure controller modulates the pressure inside of the retention room by controlling the pressure modulator. The pressure controller, by controlling the pressure modulator, makes the inside of the retention room be under a negative pressure, and also fills the coating liquid while decreasing the pressure of the retention room. [Reference numerals] (AA) Pressure in small chambers Sa to Sc; (BB) Liquid height</p> |
