发明名称 REMOTE TEST METHOD AND SYSTEM OF SEMICONDUCTOR
摘要 PROBLEM TO BE SOLVED: To provide a system and a method for remotely monitoring and developing steps in a manufacturing process of a semiconductor. SOLUTION: The remote test system of a semiconductor is provided with at least one remote work station which is connected to a local workstation through a remote access link, and a test system which is connected to the local workstation through the link. The system can remotely operate and monitor the test system of the semiconductor, and can receive data from a distance from the test system of the semiconductor. Also, the system prevents either of the remote workstations from accessing the other remote workstations by its characteristic from a security standpoint.
申请公布号 JP2002203760(A) 申请公布日期 2002.07.19
申请号 JP20010287506 申请日期 2001.09.20
申请人 SCHLUMBERGER TECHNOL INC 发明人 CHRIST FREDERIC W;WAGNER TIMOTHY J
分类号 H01L21/66;G01R19/25;G06F17/50;G06F19/00;H01L21/00;H01L21/02;(IPC1-7):H01L21/02 主分类号 H01L21/66
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