发明名称 |
LIGHT ILLUMINATING APPARATUS FOR PHOTO-ALIGNMENT |
摘要 |
The present invention improves alignment properties by including a polarizing unit which is divided into unit polarizers and detecting the polarization direction of each unit polarizer. A photoalignment illuminating apparatus according to the present invention includes the polarizing unit which includes a plurality of unit polarizers which are adjacently arranged, a scan unit which scans a UV ray from a polarized light emitting unit in a preset scan direction with regard to a substrate loaded on a stage by moving the stage or the polarized light emitting unit, and a polarized direction detecting unit which detects the polarization direction of the UV ray emitted from the polarized light emitting unit at each unit polarizer. [Reference numerals] (AA) Emitting area; (BB) Scan direction |
申请公布号 |
KR20140001240(A) |
申请公布日期 |
2014.01.06 |
申请号 |
KR20137018193 |
申请日期 |
2012.04.19 |
申请人 |
FK OPT LABO CO., LTD.;SHIN-ETSU ENGINEERING CO., LTD.;WI-A CORPORATION |
发明人 |
OHTANI YOSHIKAZU;UCHIYAMA KAZUEI;TACHIKAWA KIYOSHI;ENDO JUNJI;KAWAGOE YASUHIRO;YOON, HYEONG RYEOL;HASHIZUME KOJI |
分类号 |
G02F1/1337;G02F1/13 |
主分类号 |
G02F1/1337 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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