发明名称 LIGHT ILLUMINATING APPARATUS FOR PHOTO-ALIGNMENT
摘要 The present invention improves alignment properties by including a polarizing unit which is divided into unit polarizers and detecting the polarization direction of each unit polarizer. A photoalignment illuminating apparatus according to the present invention includes the polarizing unit which includes a plurality of unit polarizers which are adjacently arranged, a scan unit which scans a UV ray from a polarized light emitting unit in a preset scan direction with regard to a substrate loaded on a stage by moving the stage or the polarized light emitting unit, and a polarized direction detecting unit which detects the polarization direction of the UV ray emitted from the polarized light emitting unit at each unit polarizer. [Reference numerals] (AA) Emitting area; (BB) Scan direction
申请公布号 KR20140001240(A) 申请公布日期 2014.01.06
申请号 KR20137018193 申请日期 2012.04.19
申请人 FK OPT LABO CO., LTD.;SHIN-ETSU ENGINEERING CO., LTD.;WI-A CORPORATION 发明人 OHTANI YOSHIKAZU;UCHIYAMA KAZUEI;TACHIKAWA KIYOSHI;ENDO JUNJI;KAWAGOE YASUHIRO;YOON, HYEONG RYEOL;HASHIZUME KOJI
分类号 G02F1/1337;G02F1/13 主分类号 G02F1/1337
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