| 摘要 |
The present invention relates to a gas supply unit for supplying multiple gases. The gas supply unit for supplying multiple gases according to one embodiment of the present invention comprises an outer pipe and one or more inner pipes positioned in the interior of the outer pipe, wherein the gas for a first process, supplied to the inner pipe via a plurality of first gas injectors, is injected to the exterior of the outer pipe, and the gas for a second process, supplied to the outer pipe via a plurality of second gas injectors, is injected to the exterior of the outer pipe. |
