METHOD AND DEVICE FOR DETECTING POSITION OF CASSETTE

摘要

PROBLEM TO BE SOLVED: To accurately detect a cassette position. SOLUTION: In a cassette 14 vertically storing a plurality of substrates 12 at intervals in the thickness direction thereof, technology for detecting the position of the cassette 14 having on a bottom a hole 24 corresponding to the arrangement part of at least one substrate mutually moves the cassette 14 and one or more sensors 32 arranged downward thereof in the direction of the arrangement of the substrates and detects the hole 24 from downward of the cassette by the sensor 32.