METHOD FOR FORMING PLANE EXTERNAL COIL STRUCTURE, PLANE EXTERNAL COIL STRUCTURE, AND DEVICE HAVING THE PLANE EXTERNAL STRUCTURE

摘要

PROBLEM TO BE SOLVED: To provide several methods and structures for improving the yield in plane external micro device structure including springs and coils. SOLUTION: A first free end section 33 includes at least one slender tip, a second free end section 34 includes a tip having at least one structure for receiving at least one slender tip, the first free end section slants from the substrate for separation by a stress profile peculiar to the first elastic member, the second free end section inclines from the substrate for separation by the stress profile peculiar to the second elastic member, and the first free end section is connected to the second free end section for forming annular coil winding.