| 摘要 |
The present invention provides a technology for forming an organic compound film having an even film thickness on a film at a high film-formation speed while transporting the film within a vacuum tank. A film (10) which is reeled out from an original roll (41) is transported while being in contact with a center roller (3) in a vacuum tank (2), and an organic compound film is formed on the film (10). The present invention is provided with: a vapor emission device (8) having a vapor emission unit (82) which is disposed within a film formation chamber (6) provided within the vacuum tank (2) and which emits and blows the vapor of an organic compound monomer onto the film (10) on the center roller (3); and an energy ray emission device (9) which irradiates the organic compound monomer layer formed on the center roller (3) with energy rays to cure the organic compound monomer layer. The vapor emission device (8) and the film formation chamber (6) are respectively connected to a fifth and third vacuum exhaust device (80, 60) which can be independently controlled. The pressure within the vapor emission device (8) is set to be greater than the pressure within the film formation chamber (6), and the difference between the pressure within the vapor emission device (8) and the pressure within the film formation chamber (6) is set to be fixed. |
