| 摘要 |
[Problem] To easily calculate a partial gas exchange quantity for laser gas in a laser chamber. [Solution] This laser device control method may include: a gas exchange step in which a laser gain medium inside a laser chamber is exchanged, said laser chamber emitting a laser beam by exciting the laser gain medium; a first measurement step in which, after the gas has been exchanged, the pulse energy of the laser beam, which is oscillated at a prescribed gas pressure and prescribed charging voltage in the laser chamber, is measured; a step in which, on the basis of the prescribed gas pressure, prescribed charging voltage and the pulse energy from the first measurement step, an approximation equation for the relationship between the gas pressure and charging voltage in the laser chamber, and the pulse energy of the laser beam, or a table expressing the correlation therebetween, is calculated and stored; a second measurement step in which, after the first measurement step has been performed, the pulse energy (Er) of the laser beam oscillated in the laser chamber is measured; a step in which, on the basis of the calculated approximation equation or table, the pulse energy (Eec) of a laser beam that would be obtained immediately after the gas has been exchanged is calculated under the gas pressure and charging voltage conditions in the second measurement step; a step in which, on the basis of the pulse energy EEc and the pulse energy Er, the amount by which the pulse energy decreases (DeltaEd) is calculated according to DeltaEd = Eec - Er; and a step in which, on the basis of the amount by which the pulse energy decreases (DeltaEd), the partial gas exchange quantity (Q) when partial gas exchange is performed in the laser chamber is calculated. |
