| 摘要 |
A sensor for detecting a two-dimensional light-spot position. The sensor comprises a semiconductor layer (1), an insulation membrane layer (2), a metal conductive membrane layer (3), a photoresistance membrane layer (4), a resistance membrane layer (5), and four extraction electrodes (6) with the same size. The semiconductor layer (1) is arranged at the bottom; the insulation membrane layer (2), the metal conductive membrane layer (3), the photoresistance membrane layer (4), and the resistance membrane layer (5) are sequentially adhered on the top surface of the semiconductor layer (1) from bottom to top; the top surface area of the photoresistance membrane layer (4) and the top surface area of the resistance membrane layer (5) are respectively smaller than the top surface area of the metal conductive membrane layer (3); the extraction electrodes (6) are connected at the top surface of the resistance membrane layer (5); and a gap is formed between the extraction electrodes (6), the four extraction electrodes (6) are arranged at four sides of a square, and two opposite extraction electrodes (6) are symmetrically arranged around the center point of the square. The sensor is low in manufacturing costs and high in measurement sensitivity. |
