发明名称 |
SEMICONDUCTOR DEVICE |
摘要 |
To provide a semiconductor device including an oxide semiconductor in which a change in electrical characteristics is suppressed or whose reliability is improved. In a semiconductor device including an oxide semiconductor film in which a channel formation region is formed, an insulating film which suppresses entry of water and contains at least nitrogen and an insulating film which suppresses entry of nitrogen released form the insulating film are provided over the oxide semiconductor film. As water entering the oxide semiconductor film, water contained in the air, water in a film provided over the insulating film which suppresses entry of water, or the like can be given. Further, as the insulating film which suppresses entry of water, a nitride insulating film can be used, and the amount of hydrogen molecules released by heating from the nitride insulating film is smaller than 5.0 x1021 molecules/cm3. |
申请公布号 |
WO2014003086(A1) |
申请公布日期 |
2014.01.03 |
申请号 |
WO2013JP67590 |
申请日期 |
2013.06.20 |
申请人 |
SEMICONDUCTOR ENERGY LABORATORY CO., LTD. |
发明人 |
YAMAZAKI, SHUNPEI;SASAKI, TOSHINARI;HAMOCHI, TAKASHI;MIYAMOTO, TOSHIYUKI;NOMURA, MASAFUMI;KOEZUKA, JUNICHI;OKAZAKI, KENICHI |
分类号 |
H01L21/336;G02F1/1368;G09F9/30;H01L27/146;H01L29/786;H01L51/50;H05B33/14 |
主分类号 |
H01L21/336 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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