THERMAL SPRAY MATERIAL AND METHOD FOR MANUFACTURING SAME

摘要

This thermal spray material has granules containing yttrium oxyfluoride (YOF). The granules may also contain yttrium fluoride (YF3). The oxygen content of the granules is preferably 0.3 mass% to 13.1 mass%. The fracture strength of the granules is preferably 0.3 MPa to less than 10 MPa. Some of the yttrium (Y) in the granules may be substituted by at least one rare earth element (Ln) other than yttrium. The mole fraction of Ln in relation to the total of Y and Ln in such an instance is preferably no greater than 0.2.