| 摘要 |
<p>Provided are a parallelism detection system and method thereof. The system (2) comprises: a to-be-detected module (21) having a to-be-detected unit (211), a reference unit (22), and an optical measurement unit (23). The optical measurement unit (23) comprises an optical measurement module (24) and a displacement module (25). The lower surface of the to-be-detected unit (211) is a to-be-detected surface (2111), and the upper surface of the reference unit (22) is a reference surface (221). The optical measurement module (24) comprises a light source unit (241), a reflecting unit (242), and a sensing unit (243). The light source unit (241) transmits a collimated light, and the collimated light is reflected to the sensing unit (243) via the to-be-detected surface (2111), the reflecting unit (242), and the reference surface (221) in sequence. The sensing unit (243) detects the position of the collimated light and can calculate the space between the to-be-detected surface (2111) and the reference surface (221). The displacement module (25) is used to move the optical measurement module (23) so as to measure the space between different points. The parallelism between the to-be-detected surface (2111) and the reference surface (221) can be determined through multiple spacing distances.</p> |
