HIGH THROUGHPUT SCANNING PROBE MICROSCOPY DEVICE

摘要

Scanning probe microscope for mapping a sample surface, comprising a plurality of probes for scanning the sample surface, and one or more motion actuators for enabling motion of the probes relative to the sample, the device further comprising a plurality of Z-position detectors for determining a position of each probe along a Z-direction when the probe is in contact with the sample surface; wherein the plurality of probes are mounted on a plurality of heads and each of said heads is mounted on a support base, which is arranged for individually moving its associated head relative to the sample; and wherein each support base comprises a plane actuator unit comprising at least one of said motion actuators for moving the head in at least one direction parallel to the sample surface, wherein the plane actuator unit is located at a first mounting position along said support base, said first mounting position being remote from a second mounting position, wherein the head associated with the support base is mounted on the second mounting position on the support base.