发明名称 |
HIGH EFFICIENCY SOLAR CELLS FABRICATED BY INEXPENSIVE PECVD |
摘要 |
A photovoltaic device includes one or more layers of a photovoltaic stack formed on a substrate by employing a high deposition rate plasma enhanced chemical vapor deposition (HDR PECVD) process. Contacts are formed on the photovoltaic stack to provide a photovoltaic cell. Reduced defect zones are disposed adjacent to contact regions in portions of the photovoltaic cell and are formed by an anneal configured to improve overall performance. |
申请公布号 |
US2014000685(A1) |
申请公布日期 |
2014.01.02 |
申请号 |
US201213544415 |
申请日期 |
2012.07.09 |
申请人 |
FOGEL KEITH E.;HONG AUGUSTIN J.;KIM JEEHWAN;SADANA DEVENDRA K.;INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
FOGEL KEITH E.;HONG AUGUSTIN J.;KIM JEEHWAN;SADANA DEVENDRA K. |
分类号 |
H01L31/02 |
主分类号 |
H01L31/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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