发明名称 Method and Apparatus for Testing a Semiconductor Device
摘要 The present disclosure provides a method for testing a semiconductor device. The method includes providing a testing unit and an electronic circuit coupled to the testing unit and applying a first electrical signal to the testing unit. The method includes sweeping a second electrical signal across a range of values, the second electrical signal supplying power to the electronic circuit, wherein the sweeping is performed while a value of the first electrical signal remains the same. The method includes measuring a third electrical signal during the sweeping, the measured third electrical signal having a range of values that each correspond to one of the values of the second electrical signal. The method includes adopting an optimum value of the second electrical signal that yields a minimum value of the third electrical signal. The method includes testing the testing unit while the second electrical signal is set to the optimum value.
申请公布号 US2014002127(A1) 申请公布日期 2014.01.02
申请号 US201314018653 申请日期 2013.09.05
申请人 TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. 发明人 SHAO JHIH JIE;HUANG SUZ-CHIA;CHUNG TANG-HSUAN;TSENG HUAN CHI
分类号 G01R31/26 主分类号 G01R31/26
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