| 摘要 |
<p>Preferably, a frame supporting a containment chamber, a sealed process chamber confined within the containment chamber, a heat source module disposed between the containment chamber and the process chamber, and a fluid inlet box with a flow adjustment structure, the fluid inlet box in fluidic communication with an exterior of the sealed process chamber, the flow adjustment structure controls fluid flow around the exterior of the sealed process chamber. Preferentially, a thermal sensor is disposed within and contactingly adjacent a wall of the sealed thermal chamber, the thermal sensor measures an internal temperature value of the sealed process chamber, and a controller communicating with the flow adjustment structure and the thermal sensor, the controller sets a flow position of the flow adjustment structure to regulate fluid flow through the fluid inlet box, and around the exterior of the sealed process chamber in response to the measured internal temperature value.</p> |
