发明名称 COMPOSITE MATERIAL, METHOD FOR PRODUCING THE SAME, AND APPARATUS FOR PRODUCING THE SAME
摘要 Disclosed is a composite material wherein adhesion between a silicon surface and a plating material is enhanced. A method and an apparatus for producing the composite material are also disclosed. The method for producing a composite material comprises a dispersion/allocation step wherein the surface of a silicon substrate (102), which is a matrix provided with a silicon layer at least as the outermost layer, is immersed into a first solution containing gold (Au) ions, so that particulate or island-shaped gold (Au) serving as a first metal and substituted with a part of the silicon layer are dispersed/allocated on the matrix surface, and a plating step wherein the silicon substrate (102) is immersed into a second solution (24), which contains a reducing agent to which gold (Au) exhibits catalyst activity and metal ions which can be reduced by the reducing agent, so that the surface of the silicon substrate (102) is covered with the metal or an alloy of the metal (108) which is formed by autocatalytic electroless plating using gold (Au) as a starting point.
申请公布号 US2014004699(A1) 申请公布日期 2014.01.02
申请号 US201314019299 申请日期 2013.09.05
申请人 JAPAN SCIENCE AND TECHNOLOGY AGENCY 发明人 YAE SHINJI;HIRANO TATSUYA;MATSUDA HITOSHI
分类号 H01L21/02 主分类号 H01L21/02
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