| 摘要 |
A coating module is suitable to coat a liquid onto a substrate and includes two plates and a diversion structure, in which there is a slot between the plates, and the slot has a slot inlet and a slot outlet, and one of the plates has an injecting port. The diversion structure makes the injecting port communicated with the slot inlet, in which the liquid is configured to enter the diversion structure via the injecting port, and flow to the slot inlet through the diversion structure, then flow into the slot via the slot inlet and then outflows from the slot via the slot outlet to be coated onto the substrate. |
