发明名称 |
Method Of Forming A Single Metal That Performs N Work Function And P Work Function In A High-K/Metal Gate Process |
摘要 |
The present disclosure describes a semiconductor device. The device includes a semiconductor substrate, an isolation structure formed in the substrate for isolating a first active region and a second active region, a first transistor formed in the first active region, the first transistor having a high-k gate dielectric layer and a metal gate with a first work function formed over the high-k gate dielectric layer, and a second transistor formed in the second active region, the second transistor having the high-k gate dielectric layer and a metal gate with a second work function formed over the high-k gate dielectric layer. The metal gates are formed from at least a single metal layer having the first work function and the second work function. |
申请公布号 |
US2014001566(A1) |
申请公布日期 |
2014.01.02 |
申请号 |
US201314013960 |
申请日期 |
2013.08.29 |
申请人 |
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.;TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. |
发明人 |
LIN YIH-ANN;CHEN RYAN CHIA-JEN;CHAO YUAN-SHUN;MOR YI-SHIEN;HUANG KUO-TAI |
分类号 |
H01L27/092 |
主分类号 |
H01L27/092 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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